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Institute of Micro- and Nanoelectronic Systems (IMS)
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Cryogenic particle detectors
Josephson tunnel junctions
dc-SQUID-based current sensors and magnetometers
Microwave SQUID multiplexer
Fabrication technology for superconducting quantum devices
Center for high-resolution superconducting sensors (HSS)
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Institute of Micro- and Nanoelectronic Systems (IMS)
Startpage
Institute
Staff
Welcome to the Institute of Micro- and Nanoelectronic Systems (IMS)
Institute
News
Research
Lectures
Meetings
Publications
Jobs
Institute
Staff
Contact / Arrival
Staff
Head of Institute
Secretariat
Scientific staff
Students
Technical staff
Joint workshop of the IMS, IAM-ET and IIIT
Former employees
Multi-stage isolation process for planarization of Josephson junctions
chair:
josephson junctions
type:
Diplomarbeit
tutor:
Dipl.-Ing. Max Meckbach
person in charge:
Michael Merker
