Implementation of inline measurements by means of reflectometry in a MEMS process to ensure manufacturing stability
- chair:MEMS-Technologie
- tutor:
Dipl.-Ing. Michael Merker,
externe Arbeit bei Bosch
- person in charge:
Tobias Busch
Dipl.-Ing. Michael Merker,
externe Arbeit bei Bosch
Tobias Busch